Controllable electromechanical stability of a torsional micromirror actuator with piezoelectric composite structure under capillary force

Various types of micro/nano functional devices are being widely designed as optical switches, micro scanners, micromirrors and other core devices. The continuing miniaturization the makes size dependence electromechanical property significant in scale due to sharp increase surface interactions such capillary force from liquid bridge, van der Waals Casimir forces quantum fluctuations. can cause pull-in instability, adhesion between parts, even failure device. This work provides an active control method avoid instability electrostatically driven circular micromirror by applying voltage on a torsional piezoelectric composite structure. influences three compared dispersion stability actuator. A comprehensive model beam was established numerically investigate coupling micromirror. results show that influence is force. By introducing nanoplates into laminated structure, be controlled based effect contribute structural optimization design manufacture systems. Cited as: Liu, M., Chen, Y., Cheng, W., S., Yu, T., Yang, W. Controllable actuator with structure under Capillarity, 2022, 5(3): 51-64. https://doi.org/10.46690/capi.2022.03.02